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Category:Microtechnology

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Microtechnology is a set of processes, techniques and tools used to create structures having at least one dimension of a functional feature in order of micrometer (one millionth of a metre, or 10-6 metre, or 1μm), typically within the range of 10⁻⁴ to 10⁻⁷ meters and application of those structures in more complex systems.

Microtechnology

Microelectromechanical systems
Microtechnology
Micromachinery

Basic structures

Interdigital transducer
Cantilever
Microchannel

Applications

Sensors	Microbolometer
Actuators	Comb drive Scratch drive actuator Thermal actuator
Switches	Digital micromirror device Optical switch
Other	Millipede memory Radio-frequency microelectromechanical systems Microoptoelectromechanical systems Microphotonics Biological microelectromechanical systems Microfluidics Micropower

Processes

General	Surface micromachining Bulk micromachining HAR micromachining Deposition Lithography Etching Wire bonding
Specific	LOCOS Shallow trench isolation LIGA Lift-off Photolithography Silicon on insulator Smart cut

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Subcategories

This category has the following 3 subcategories, out of 3 total.

L

Lithography (microfabrication) (3 P)

M

Microarrays (3 P)

S

Semiconductor device fabrication (5 C, 3 P)

Pages in category "Microtechnology"

This category contains only the following page.

H

Kept on Wikipedia:Hybrid Insect Micro-Electro-Mechanical Systems

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